✦ LIBER ✦
A simple optical emission method for measuring percent dissociations of feed gases in plasmas: Application to Cl2 in a high-density helical resonator plasma
✍ Scribed by V. M. Donnelly
- Book ID
- 126724880
- Publisher
- AVS (American Vacuum Society)
- Year
- 1996
- Tongue
- English
- Weight
- 535 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.580137
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