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A simple microwave component for the vacuum window protection in an ECR ion source for ion beam processing

✍ Scribed by Ph Coste; L Wartski; J Aubert; C Schwebel


Book ID
113822636
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
320 KB
Volume
217
Category
Article
ISSN
0168-583X

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An electron cyclotron resonance (ECR) ion source using a selected circular mode microwave is studied for material processing. It is expected to enhance efficiency of ECR. A cavity resonator of large diameter (280 mm) is constructed for simulated experiments, and excitation of several modes in the re