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A simple method for calculation of the pull-in voltage and touch-point pressure for the small deflection of square diaphragm in MEMS

✍ Scribed by Anurekha Sharma; P.J. George


Book ID
111713720
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
484 KB
Volume
141
Category
Article
ISSN
0924-4247

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