✦ LIBER ✦
A simple approach to fabrication of high-quality HfSiON gate dielectrics with improved nMOSFET performances
✍ Scribed by Xuguang Wang; Jun Liu; Feng Zhu; Yamada, N.; Dim-Lee Kwong
- Book ID
- 114617589
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 829 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0018-9383
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