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A series of very high-vacuum valves with electric heaters for nominal apertures of 10, 20, 30, 50, 100, 150 and 200 nm: I R Kirichek et al, Physico-Technnical Institute, Academy of Sciences of the Ukrainian SSR, Questions of Atomic Science and Technology, Series High-Vacuum Physics and Technology, No. 1 (1), Khar'kov (1973)


Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
165 KB
Volume
25
Category
Article
ISSN
0042-207X

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