A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling
✍ Scribed by Bruce C.S Chou; Yeong-Maw Chen; Mang Ou-Yang; Jin-Shown Shie
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 430 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.
✦ Synopsis
A sensitive micro-Pirani vacuum sensor has been fabricated. With effective schemes of ambient-temperature compensation and stabilization, it is capable of measuring vacuum pressure linearly from 1 torr down to 10 -7 torr, a three orders-of-magnitude improvement in resolution over conventional gauges. A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed. It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables. Good agreement between the measured data obtained from a constant-temperature readout circuit and the simulation result is demonstrated.