A self-focused multichannel electron beam source for annealing of ion-implanted semiconductors : Juh-Tzeng Lue, Sheau-Yang Shyu and Ling-Hsiao Lyu. Vacuum36(5), 275 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 135 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90290-3