A Self-Aligned Ni-InGaAs Contact Technology for InGaAs Channel n-MOSFETs

✍ Scribed by Zhang, Xingui; Ivana, ; Guo, Hua Xin; Gong, Xiao; Zhou, Qian; Yeo, Yee-Chia

• Book ID: 118049911
• Publisher: The Electrochemical Society
• Year: 2012
• Tongue: English
• Weight: 425 KB
• Volume: 159
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/2.060205jes