✦ LIBER ✦
A self-aligned fabrication method of dual comb drive using multilayers SOI process for optical MEMS applications
✍ Scribed by W. T. Lin; J. C. Chiou; C. Tsou
- Book ID
- 106184785
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- English
- Weight
- 489 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0946-7076
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