✦ LIBER ✦
A scanning local probe profilometer and reflectometer: application to optical control of integrated circuits
✍ Scribed by M. Spajer; O. Bergossi; M. Guignard
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 578 KB
- Volume
- 106
- Category
- Article
- ISSN
- 0030-4018
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