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A sandwiched flexible polymer mold for control of particle-induced defects in nanoimprint lithography

✍ Scribed by Li, Bin; Zhang, Jizong; Ge, Haixiong


Book ID
118782262
Publisher
Springer
Year
2012
Tongue
English
Weight
736 KB
Volume
110
Category
Article
ISSN
1432-0630

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