✦ LIBER ✦
A rule-based VLSI process flow validation system with macroscopic process simulation : Kiyohiko Funakoshi and Kazushi Mizuno. IEEE Trans. Semicond. Mfg3(4), 239 (1990)
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 131 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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