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A round robin experiment of elemental sensitivity factors in low-energy ion scattering

✍ Scribed by H.H. Brongersma; M. Carrere-Fontaine; R. Cortenraad; A.W. Denier van der Gon; P.J. Scanlon; I. Spolveri; B. Cortigiani; U. Bardi; E. Taglauer; S. Reiter; S. Labich; P. Bertrand; L. Houssiau; S. Speller; S. Parascandola; H. Ünlü-Lachnitt; W. Heiland

Book ID
114170270
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
198 KB
Volume
142
Category
Article
ISSN
0168-583X

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Secondary ion mass spectrometry round-robin study of relative sensitivity factors in gallium arsenide
✍ Homma, Y.; Tohjou, F.; Masamoto, A.; Shibata, M.; Shichi, H.; Yoshioka, Y.; Adac 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 330 KB 👁 2 views

Round-robin studies on relative sensitivity factors (RSFs) in secondary ion mass spectrometry (SIMS) were conducted using bulk GaAs samples uniformly doped with various impurity elements. A total of 31 laboratories participated in two round-robins. More than 30 sets of relative ion intensities were