✦ LIBER ✦
A review of the properties of aluminium alloy films used during silicon device fabrication : R. J. Wilson and B. L. Weiss. Vacuum42(12), 719 (1991)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 129 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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