A review of LPCVD metallization for semiconductor devices : M. J. Cooke. Vacuum 35 (2) 67 (1985)

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 131 KB
• Volume: 26
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(86)90621-9