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A resonant micro accelerometer based on electrostatic stiffness variation

โœ Scribed by Claudia Comi, Alberto Corigliano, Aldo Ghisi, Sarah Zerbini


Book ID
120748832
Publisher
Springer Netherlands
Year
2013
Tongue
English
Weight
898 KB
Volume
48
Category
Article
ISSN
0025-6455

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