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A resonant CMUT-based fluid sensor: Modeling and simulation

✍ Scribed by M. Thränhardt; P.-C. Eccardt; H. Mooshofer; P. Hauptmann


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
653 KB
Volume
156
Category
Article
ISSN
0924-4247

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✦ Synopsis


Fluid waves at the interface of Capacitive Micromachined Ultrasound Transducers (CMUTs) to the surrounding fluid are an often discussed and unwanted effect for medical applications, as they cause crosstalk between neighboring membranes. A new approach is presented which uses these dispersive surface waves for sensing fluid properties like density and viscosity. The paper describes the sensor principle, the FEM modeling and discusses first simulation results.


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