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A reduced-order model for electrically actuated microbeam-based MEMS

✍ Scribed by Younis, M.I.; Abdel-Rahman, E.M.; Nayfeh, A.

Book ID: 120266833
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 485 KB
Volume: 12
Category: Article
ISSN: 1057-7157
DOI: 10.1109/JMEMS.2003.818069

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