A radial mirror analyzer for scanning electron/ion microscopes

✍ Scribed by Hung Quang Hoang; Anjam Khursheed

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 772 KB
• Volume: 635
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2011.01.085

✦ Synopsis

This paper presents a high-resolution transmittance electron energy analyzer suitable for use as an attachment inside the specimen chambers of scanning electron/ion microscopes. The analyzer uses a rotationally symmetric electric field distribution to transport electrons/ions emitted from a central point source in a radial direction on to a ring-shaped collection/detection area. The analyzer is designed to fit around a conical shaped objective lens pole-piece/electrode, allowing for a relatively short minimum working distance, 5 mm or less. Simulation results for the analyzer design predict that it will have a relative energy resolution of 0.025% for an entrance angular spread of 7 61, around an order of magnitude better then the well-known Cylindrical Mirror Analyzer (CMA). The analyzer design allows for a parallel mode of operation in which the energy bandwidth on a conical shaped detection plane is predicted to be as high as 32% (7 16%) of the central-band energy. On a flat ring-shaped detection plane, the energy bandwidth is predicted to be around 12% (7 6%) of the central-band energy, over which the simulated relative energy resolution remains below 0.06% for angular spreads of 7 61.