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A quartz-bar megasonic system for nano-pattern cleaning

✍ Scribed by Kim, Hyunse; Lee, Yanglae; Lim, Euisu

Book ID: 121618691
Publisher: Korean Society for Precision Engineering
Year: 2013
Tongue: English
Weight: 306 KB
Volume: 14
Category: Article
ISSN: 1229-8557
DOI: 10.1007/s12541-013-0230-8

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