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A quantitative characterization of the optical absorption spectrum associated with hydrogenated amorphous silicon

✍ Scribed by Farida Orapunt; Stephen K. O’Leary


Book ID
106398282
Publisher
Springer US
Year
2008
Tongue
English
Weight
370 KB
Volume
20
Category
Article
ISSN
0957-4522

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We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and