✦ LIBER ✦
A Pyrazolate-Based Metalorganic Tantalum Precursor That Exhibits High Thermal Stability and Its Use in the Atomic Layer Deposition of Ta 2 O 5
✍ Scribed by Dezelah, ; Wiedmann, Monika K.; Mizohata, Kenichiro; Baird, Ronald J.; Niinistö, Lauri; Winter, Charles H.
- Book ID
- 123621060
- Publisher
- American Chemical Society
- Year
- 2007
- Tongue
- English
- Weight
- 62 KB
- Volume
- 129
- Category
- Article
- ISSN
- 0002-7863
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