✦ LIBER ✦
A pulsed laser ablation/plasma chemical vapor deposition tandem system for combinatorial device fabrication
✍ Scribed by N. Matsuki; Y. Abiko; M. Kobayashi; K. Miyazaki; H. Fujioka; H. Koinuma
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 872 KB
- Volume
- 79
- Category
- Article
- ISSN
- 1432-0630
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