✦ LIBER ✦
A proposed magnetically enhanced reactive ion etcher for ULSI : Haruhiro H. Goto et al. IEEE Transactions on Semiconductor Manufacturing, 5(4), 337 (1992)
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 97 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0026-2714
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