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A process for monolithic fabrication of microlenses on integrated circuits : Z D POPOVIC (Xerox Res. Centre of Canada, Mississauga, Ont., Canada), R A SPRAGUE, G A N CONNELL Proc. SPIE — Int. Soc. Opt. Eng. (USA), vol. 898, pp. 23–25 (1988). (Miniature Optics and Lasers, Los Angeles, CA, USA, 11–12 Jan. 1988)


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
67 KB
Volume
20
Category
Article
ISSN
0026-2692

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