✦ LIBER ✦
A preliminary study on chemical micro-machining of complex three-dimensional patterns on silicon substrates
✍ Scribed by Kang Shi; Jing Tang; Li Zhang; Yong-liang Zhou; Dong-sheng Qu; Li-Ning Sun; Zhong-Qun Tian
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 300 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1432-8488
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