✦ LIBER ✦
A Preliminary Evaluation of the Fourier Transform Infrared (FTIR) Spectrometer as a Quantitative Air Monitor for Semiconductor Manufacturing Process Emissions
✍ Scribed by STRANG, CHRISTOPHER R.; LEVINE, STEVEN P.; HERGET, WILLIAM F.
- Book ID
- 120172403
- Publisher
- Informa UK (Taylor & Francis)
- Year
- 1989
- Tongue
- English
- Weight
- 598 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0002-8894
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