✦ LIBER ✦
A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique
✍ Scribed by He, Mingyang; Zhang, Zhiyou; Shi, Sha; Du, Jinglei; Li, Xupeng; Li, Shuhong; Ma, Wenying
- Book ID
- 115413453
- Publisher
- Optical Society of America
- Year
- 2010
- Tongue
- English
- Weight
- 906 KB
- Volume
- 18
- Category
- Article
- ISSN
- 1094-4087
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