✦ LIBER ✦
A practical model for growth kinetics of thermal SiO2 on silicon applicable to a wide range of oxide thickness
✍ Scribed by Masayoshi Naito; auHideo Homma; Naohiro Momma
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 621 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0038-1101
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