✦ LIBER ✦
A practical method for optical dispersion model selection and parameters variations in scatterometry analysis with variable n&k's
✍ Scribed by Likhachev, D.V.
- Book ID
- 121724035
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 767 KB
- Volume
- 562
- Category
- Article
- ISSN
- 0040-6090
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