✦ LIBER ✦

A positive-working photosensitive alkaline-developable polyimide with a highly dimensional stability and low dielectric constant based on poly(amic acid) as a polyimide precursor and diazonaphthoquinone as a photosensitive compound

✍ Scribed by H. Seino; A. Mochizuki; O. Haba; M. Ueda

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 57 KB
Volume: 36
Category: Article
ISSN: 0887-624X
DOI: 10.1002/(sici)1099-0518(199812)36:17<3197::aid-pola23>3.0.co;2-3

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✦ Synopsis

The contrast was misreported in the original article. The correct contrast is 2.3, not 7.8, as first stated.

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A positive-working photosensitive alkaline-developable polyimide with a highly dimensional stability and low dielectric constant based on poly(amic acid) as a polyimide precursor and diazonaphthoquinone as a photosensitive compound

✍ Hiroshi Seino; Amane Mochizuki; Osamu Haba; Mitsuru Ueda 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 212 KB 👁 1 views

A positive-working photosensitive polyimide precursor based on fluorinated poly(amic acid) (FPAA) and 2,3,4-tris(1-oxo-2-diazonaphthoquinon-4-ylsulfonyloxy-)benzophenone (D4SB) as a photosensitive compound has been developed. FPAA was prepared by ring-opening polyaddition of dianhydrides, pyromellit