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A polarization method for characterizing rectangular microgrooves from the phase response of a differential heterodyne microscope

✍ Scribed by D. V. Baranov; E. M. Zolotov

Book ID: 110175792
Publisher: SP MAIK Nauka/Interperiodica
Year: 2008
Tongue: English
Weight: 209 KB
Volume: 105
Category: Article
ISSN: 0030-400X
DOI: 10.1134/s0030400x08090166

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