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A Plasma Stopper in a Hollow Cathode

✍ Scribed by G. G. Sikharulidze; A. E. Lezhnev

Book ID
110408668
Publisher
Springer
Year
2002
Tongue
English
Weight
30 KB
Volume
45
Category
Article
ISSN
0020-4412

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## Abstract The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen wit