✦ LIBER ✦
A plasma ion source with plane beam profile for UHV-SIMS measurements
✍ Scribed by Klaus-Dieter Klöppel; Wolfhart Seidel
- Publisher
- Elsevier Science
- Year
- 1980
- Weight
- 454 KB
- Volume
- 177
- Category
- Article
- ISSN
- 0029-554X
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