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A piezoresistive integrated pressure sensor

✍ Scribed by Kazuji Yamada; Motohisa Nishihara; Ryosaku Kanzawa; Ryoichi Kobayashi

Publisher: Elsevier Science
Year: 1983
Weight: 772 KB
Volume: 4
Category: Article
ISSN: 0250-6874
DOI: 10.1016/0250-6874(83)85009-4

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