Permanent magnet finger-size scanning el
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K. Nelliyan; A. Khursheed
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Article
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2011
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Elsevier Science
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English
β 959 KB
This paper presents permanent magnet scanning electron microscope (SEM) designs for both tungsten and field emission guns. Each column makes use of permanent magnet technology and operates at a fixed primary beam voltage. A prototype column operating at a beam voltage of 15 kV was made and tested in