Fabrication of diamond nanorods for gas
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Marina Davydova; Alexander Kromka; Bohuslav Rezek; Oleg Babchenko; Martin Stuchl
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Article
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2010
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Elsevier Science
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English
β 421 KB
Diamond nanorods were fabricated for a sensing device by utilizing reactive ion etching in CF 4 /O 2 radio frequency plasma. The length of the nanorods has been controlled by the ion etching time. The obtained morphologies were investigated by scanning electron microscopy. The gas sensing properties