A one-component negative photoresist based on an epoxy terpolymer containing oxime-urethane groups as a photobase generator

✍ Scribed by Kyu Ho Chae; Jin Hee Park

• Book ID: 105735550
• Publisher: The Polymer Society of Korea
• Year: 2004
• Tongue: English
• Weight: 297 KB
• Volume: 12
• Category: Article
• ISSN: 1598-5032
• DOI: 10.1007/bf03218411