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A numerical study of the influence of feeding polycrystalline silicon granules on melt temperature in the continuous Czochralski process

✍ Scribed by Naoki Ono; Michio Kida; Yoshiaki Arai; Kensho Sahira


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
670 KB
Volume
132
Category
Article
ISSN
0022-0248

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