A Novel Thin-Film Copper Array Based on
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Hassan Arida; Monika Turek; David Rolka; Michael J. Schöning
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Article
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2009
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John Wiley and Sons
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English
⚖ 303 KB
## Abstract A first step towards the microfabrication of a thin‐film array based on an organic/inorganic sensor hybrid has been realized. The inorganic microsensor part incorporates a sensor membrane based on a chalcogenide glass material (Cu‐Ag‐As‐Se) prepared by pulsed laser deposition technique