✦ LIBER ✦
A novel two-step etching process for reducing plasma-induced oxide damage
✍ Scribed by Kuo-Feng You; Ching-Yuan Wu
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 427 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0038-1101
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