✦ LIBER ✦
A novel technique for stress gradient measurement of electrostatic MEM switches and non ideal anchor’s effects
✍ Scribed by Ghader Rezazadeh; Hamed Sadeghian; Mikhail Zubtsov
- Book ID
- 106342618
- Publisher
- Springer
- Year
- 2009
- Tongue
- English
- Weight
- 301 KB
- Volume
- 62
- Category
- Article
- ISSN
- 0925-1030
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