A novel SLS ELA crystallization process and its effects on polysilicon film defectivity and TFT performance

✍ Scribed by Despina C. Moschou; M.A. Exarchos; D.N. Kouvatsos; G.J. Papaioannou; A.T. Voutsas

• Book ID: 104051928
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 414 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.01.083