A novel route to extreme vacua: the non-evaporable getter thin film coatings
✍ Scribed by C. Benvenuti; J.M. Cazeneuve; P. Chiggiato; F. Cicoira; A. Escudeiro Santana; V. Johanek; V. Ruzinov; J. Fraxedas
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 165 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0042-207X
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✦ Synopsis
Vacuum chambers sputter-coated with a thin film ( &1.5 m) of a getter material, and subsequently exposed to ambient air, have been found to recover a pumping action after ''in situ'' bakeout. Coatings of Ti, Hf, Zr have been initially produced and studied, followed by their binary quasi-equiatomic alloys TiHf, HfZr, TiZr. All these coatings display activation at temperatures lower than 400°C, as observed by means of X-ray photoelectron spectroscopy, electron stimulated desorption (ESD), pumping speed and ultimate pressure measurements. The lowest activation onset temperature, about 200°C, has been measured for the quasi-equiatomic TiZr alloy. A further activation temperature decrease has been achieved for TiZr based ternary alloys/compounds, which are currently being investigated.