A novel optical gas sensor based on sputtered InxOyNz films with gold-nano-dots
✍ Scribed by H. Steffes; A. Schleunitz; U. Gernert; R. Chabicovsky; E. Obermeier
- Book ID
- 104050545
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 311 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
In this paper we present new results achieved with a sputtered multilayer system consisting of In x O y N z and gold-nano-dots. This system shows not only electrical but also optical gas sensitivity. The optical sensing effect is enhanced by the gold-nano-dots which are randomly distributed on and inside each In x O y N z layer. The optical measuring system consists of a tuneable light source (or alternatively of a simple light emitting diode) and a CdS-photoresistor. As an example of the optical gas sensing effect we show the sensitivity to hydrogen at a temperature of 400 °C.