✦ LIBER ✦
A novel movable electrode for realizing deep sub-micrometer gap in SOI-based MEMS square resonator
✍ Scribed by J. W. Jiang, J. F. Bao, Y. J. Du, C. Deng
- Book ID
- 120914857
- Publisher
- Springer-Verlag
- Year
- 2012
- Tongue
- English
- Weight
- 750 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.