A novel MOEMS based adaptive optics for X-ray focusing

✍ Scribed by M.Y. Al Aioubi; P.D. Prewett; S.E. Huq; V. Djakov; A.G. Michette

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 338 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.01.107

✦ Synopsis

This work presents the design and microfabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration.