A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force

✍ Scribed by Chao, Paul C-P; Chiu, C-W; Tsai, C-Y

• Book ID: 120453054
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 730 KB
• Volume: 16
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/16/5/016