✦ LIBER ✦
A novel method to fabricate single crystal nano beams with (111)-oriented Si micromachining
✍ Scribed by Heng Yang; Kefeng Xu; Yongliang Yang; Tie Li; Jiwei Jiao; Xinxin Li; Yuelin Wang
- Book ID
- 106185520
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 655 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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