✦ LIBER ✦
A novel method of using the OES line ratio to determine the spatially resolved atomic density in low-temperature plasmas and its application in carbon and aluminium atoms in capacitively coupled plasmas
✍ Scribed by Li, Jiang; Zhu, Xi-Ming; Pu, Yi-Kang
- Book ID
- 120300308
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 444 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0022-3727
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